產(chǎn)品品牌：

美國mks

產(chǎn)品型號(hào)：

1559A

1559A質(zhì)量流量控制器（大流量，常閉閥）

1559 是一種通用型彈性密封的質(zhì)量流量控制器，可在20slm（42.5cfh）到200slm（425cfh）量程范圍進(jìn)行氣體的質(zhì)量流量控制。相比于其它的 大流量控制器，1559獨(dú)有的控制閥門能夠消除振蕩、具有更好的響應(yīng)時(shí)間。它的這個(gè)特點(diǎn)是通過使用一“平衡力”閥門的設(shè)計(jì)來實(shí)現(xiàn)的，它能夠消除管道壓力引 起控制閥門內(nèi)部的非平衡狀態(tài)。1559的為全量程的±1％。                                                                                                          例：型號(hào)1559A00421LS1BV                                        采購序列號(hào)         校準(zhǔn)氣體（SEMI氣體編號(hào)）*Helium, He                                                         001Argon, Ar                                                           004Hydrogen, H2                                                      007Nitrogen, N2                                                         013Oxygen, O2                                                         015      **校準(zhǔn)流量SLM－sccm（相當(dāng)?shù)獨(dú)?strong>200SLM）20                                                                                                             021L                    50                                                                                                             051L                    100                                                                                                           12L               200                                                                                                           22L                       裝配件（Y）標(biāo)配：Swagelok 0.5英寸管                                                               S                         選配：Swagelok^R8VCR^R凸接頭                                                           R                         選配：Swagelok^R8VCO^R凸接頭                                                           G                          閥常閉                                                            1 電氣/通訊連接器模擬15針D                                                     B 密封（Z）標(biāo)配:Viton^R                                                                                             V                         選配: Neoprene^R                                                                                       N                         選配: Buna N                                                                                            B                         選配: Kalrez^R                                                                                            K                              型號(hào)1559A（續(xù)）  用于1559A的電纜線CB259-5-10用來將1559連接至PR4000, 246, 247                                            （如要在247上連接2個(gè)以上的通道，需要添加一個(gè)電源，請(qǐng)用CB1559-1-10）         CB147-1-10用來將1559連接至146, 186, 647, 167                             CB1559-1-M1用來連接1559A、247D和260PS