ASTAR-i具有以下特性:
The TASTAR-i has below featur:
技術(shù)參數(shù)(Characteristics)
分度角A.(俯仰)
Indexable axis A(Roll) From0°to90°,step of 15°
分度角B(旋轉(zhuǎn))
Indexable axis B(Pitch) ±180°,step of 15°
單向重復(fù)性
Uni-directional Repeatability 0.35μm
定位重復(fù)性 Position Repeatability 1.5μm
探測(cè)方向Probe Sense Direction ±X,±Y,+Z
可調(diào)觸發(fā)力
Adjustable Trigger Force 0.1~0.3 N
位置數(shù)Positions Number 168