| SPECIFICATIONS： |
|
| Physical |
Excel 5120 |
Excel 5220 |
| Measuring Volume |
900*1200*150mm(35.4"*4 7.2"*5.9") |
| External Dimensions |
L2285*1525*H1650 (90"*60"*65") |
| Weight |
2050kg(4500lb) |
| Capacity |
100kg(220lb) |
| Stage |
Steel |
| Base Mdterial |
Granite |
| Ways |
Unique X&Y Monorail,Monorail Linear Z |
| Motion Cortrol |
Servo:CNC,Moues,and Pendant Control |
| Power Requirements |
93-264VAC,47-63Hz,10Amp max. |
| Performance |
Excel 5120 |
Excel 5220 |
| XY Accuracy |
U=5.0+L/300µm |
| Z Accuracy |
U=3.0+L/150µm |
| XY Repeat |
5.0µm(0.000200") |
| Z Repeatability |
3.0µm(0.000120") |
| X,Y Acceleration |
1000mm/s2(40"/s2) |
| Z Acceleration |
500mm/s2(20"/s2) |
| X,Y Speed |
150mm/s2(20"/s2) |
| Scale Resolution |
0.5µm(0.000020") |
| Features |
Excel 5120 |
Excel 5220 |
| Video |
Hi-Res B&W |
Hi-Res Color |
| lllumination Source |
Red LEDs |
White LEDs |
| Lighting |
Surface,Profile,and Axial |
| Optics/Magnification |
12:1 Programmable Zoom/～17x-400x |
| Software |
InSpec for Windows Metrolongy Software |
| Computer |
1.2GHz,256MB RAM,Windows2000,CD-RW,Ethernet Card |
| Environmental |
20℃(680F)±20,30-80% Humiditiy |
| Warranty |
1Year Parts and Service |
